Nhanganyaya kune kaviri beam scanning electron microscopy (DB-FIB)

Midziyo yakakosha ye microanalysis matekiniki anosanganisira: optical microscopy (OM), kaviri-beam scanning electron microscopy (DB-FIB), scanning electron microscopy (SEM), uye transmission electron microscopy (TEM).Chinyorwa chanhasi chichasuma musimboti uye mashandisirwo eDB-FIB, tichitarisa pakugona kwesevhisi yeredhiyo neterevhizheni metrology DB-FIB uye mashandisirwo eDB-FIB pakuongorora semiconductor.

Chii chinonzi DB-FIB
Dual-beam scanning electron microscope (DB-FIB) chiridzwa chinobatanidza ion danda rakatariswa uye scanning electron beam pane imwe maikorosikopu, uye ine zvishongedzo zvakaita segasi jekiseni system (GIS) uye nanomanipulator, kuitira kuti uwane mabasa mazhinji. senge etching, material deposition, micro uye nano processing.
Pakati pazvo, iyo yakanangwa ion danda (FIB) inomhanyisa iro ion danda rinogadzirwa neiyo liquid gallium simbi (Ga) ion sosi, yobva yatarisa pamusoro peiyo sampuli kugadzira yechipiri masaini masaini, uye inounganidzwa ne detector.Kana shandisa yakasimba yazvino ion danda kuti utarise iyo sampuli nzvimbo yemicro uye nano processing;Musanganiswa wekupopota kwepanyama uye kemikari gasi maitiro anogona kushandiswawo kusarudza etch kana kuisa simbi uye insulators.

Mabasa makuru uye mashandisirwo eDB-FIB
Mabasa makuru: yakatarwa poindi-muchinjika-chikamu kugadzirisa, TEM sampuli kugadzirira, kusarudza kana kukwidziridzwa etching, simbi zvinhu deposition uye insulating layer deposition.
Munda wekushandisa: DB-FIB inoshandiswa zvakanyanya mumidziyo yeceramic, mapolymer, simbi zvinhu, biology, semiconductor, geology uye mamwe minda yekutsvagisa uye ine chekuita nekuyedzwa kwechigadzirwa.Kunyanya, DB-FIB yakasarudzika yakagadziriswa-poindi yekufambisa sampuli yekugadzirira kugona kunoita kuti isadzorereke mune semiconductor kutadza kuongorora kugona.

GRGTEST DB-FIB sevhisi kugona
Iyo DB-FIB parizvino yakashongedzerwa neShanghai IC Test uye Analysis Laboratory ndiyo Helios G5 nhevedzano yeThermo Field, inova yakanyanya kusimukira Ga-FIB nhevedzano pamusika.Iwo akatevedzana anogona kuwana scanning electron beam imaging resolution pazasi 1 nm, uye yakagadziridzwa zvakanyanya maererano neion beam performance uye otomatiki kupfuura chizvarwa chakapfuura chembiri-beam electron microscopy.Iyo DB-FIB inoshongedzerwa nemananomanipulators, gasi jekiseni masisitimu (GIS) uye simba spectrum EDX kusangana neyakasiyana uye yepamusoro semiconductor kutadza kuongororwa zvinodiwa.
Sechishandiso chine simba chekuongorora semiconductor yemuviri kutadza kutadza, DB-FIB inogona kuita yakagadziriswa-poindi yepakati-chikamu machining ine nanometer chaiyo.Panguva imwecheteyo yekugadziriswa kweFIB, iyo scanning electron beam ine nanometer resolution inogona kushandiswa kuona iyo microscopic morphology ye cross-section uye kuongorora kuumbwa munguva chaiyo.Kuwana kuiswa kwezvinhu zvakasiyana zvesimbi (tungsten, platinamu, nezvimwewo) uye zvisiri zvesimbi (carbon, SiO2);TEM Ultra-yakatetepa zvimedu zvinogona zvakare kugadzirirwa panzvimbo yakatemwa, iyo inogona kusangana nezvinodiwa zvekutarisisa-yepamusoro resolution yekutarisa padanho reatomu.
Tichaenderera mberi nekudyara mumidziyo yepamberi yemagetsi microanalysis, tichiramba tichivandudza uye nekuwedzera semiconductor kutadza kuongororwa zvine chekuita nekugona, uye nekupa vatengi vane yakadzama uye yakazara yekutadza kuongorora mhinduro.